Enhancing Hydrogen Activation in Poly-Si Contacts: Microwave Annealing Study
Key Ideas
  • Microwave annealing demonstrated effective hydrogen activation in hydrogen-rich dielectrics on poly-Si contacts compared to traditional N2 annealing methods.
  • The study showed localized improvements in passivation after just one minute of microwave annealing, with SiNy layers exhibiting superior passivation effects.
  • SiNy layers provided the best passivation for c-Si bulk and interfaces, while AlOx was the least effective; microwave annealing offered cost-effective and efficient passivation options.
  • The research indicates that microwave annealing could be a promising alternative for hydrogenation in poly-Si passivating contacts, providing comparable or superior results to traditional methods.
A study published in Advanced Energy and Sustainability Research has highlighted the effectiveness of microwave annealing in activating hydrogen within hydrogen-rich dielectrics on poly-Si passivating contacts compared to traditional N2 annealing methods. The research focused on hydrogenation of dangling bonds at the Si/SiO2 interface in doped poly-Si contacts, vital for tunneling oxide passivated contacts and poly-Si on oxide solar cells. Microwave annealing, with its shorter processing times and cost-effective passivation, emerged as a promising alternative to achieve optimal hydrogenation. The study utilized industrial n-type Czochralski-Si wafers with various dielectric passivation layers deposited on them to investigate their impact on passivation. Results showed that microwave annealing led to enhancements in passivation after just one minute, with SiNy layers standing out for their superior passivation effects. The PL imaging revealed that different dielectric coatings impacted passivation levels, with SiNy demonstrating the best passivation for c-Si bulk and interfaces. Despite some variations in PL intensity and peak signals, microwave-annealed specimens displayed comparable or even better results in hydrogen activation than traditional N2 annealing. The research suggests that microwave annealing could offer an efficient and cost-effective solution for hydrogenation in poly-Si passivating contacts, potentially revolutionizing industrial silicon solar cell production.
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